M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド Revision:SEMI M21-1110 - Superseded SEMI E5 — Specification for

SEMI E5 — Specification for SEMI Equipment Communication Standard 2 Message Content (SECS-II)

It qualifies apparatus for use over a wide range of sample values

This Specification is designed to meet the requirements of automated assembly

The inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology

Intended Audience — This Standard is intended for use by OEMs

M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド Revision:SEMI M21-1110 - Superseded SEMI E5 — Specification forglobal Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199220043 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M17 Guide for a Universal Wafer Grid SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology of Silicon Technology