M08400 - SEMI M84 - Specification for Polished Single Crystal Silicon Wafers for Gallium Nitride-On-Silicon Applications Revision:SEMI M84-0414E (Reapproved 0923) - Current SEMI G82 — Provisional Specification

SEMI G82 — Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process

SEMI G96-1014 (first published)

時刻同期のためのネットワーク時刻プロトコル（NTPv3）が本仕様で指定されている。なぜなら，イーサネットに限定されないマルチキャストメッセージングをサポートするローカルエリアネットワークによるシステム通信に適用できるからである。このプロトコルは，同期に様々な固有の正確さと安定性のクロックを含む異機種環境を可能にする。

SEMI 3D2-1113 (technical revision)

This Document covers the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample

M08400 - SEMI M84 - Specification for Polished Single Crystal Silicon Wafers for Gallium Nitride-On-Silicon Applications Revision:SEMI M84-0414E (Reapproved 0923) - Current SEMI G82 — Provisional SpecificationSingle crystal (monocrystalline) silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. Gallium nitride on single crystal silicon wafers represents emerging markets with applications such as high brightness light emitting diodes (HB LED) or high frequency power devices. At present, the specifications for silicon wafer substrates requested by customers of such wafers differ widely. To permit common